Hydrodynamic simulation and the effect of centrifugal forcefor chemical mechanical polishing process

Chemical mechanical polishing process is a combination ofchemical dissolution and mechanical action. The mechanical action of CMPinvolves hydrodynamic lubrication. In this paper, the modified Reynoldsequation with centrifugal force is investigated and solved by means ofChebyshev acceleration method with successive over-relaxation algorithm, toobtain the effects of centrifugal force on the slurry pressuredistributions. The numerical results show that it is markedly different forthe pressure distribution and the same tendency for dimensionless resultantforces and moments along with standard nominal clearance, rolling angle,pitch angle and pad angular velocity, obtained from the Reynolds equationswith and without centrifugal force terms, though the values of dimensionlessresultant forces and moments are different, with the significant effect ofthe pad angular velocity.