1 张文明, 孟光, 魏克湘. 参数激励下静电驱动微机电系统动力特性研究. 力学学报, 2009, 41(2): 282-288 (Zhang Wenming, Meng Guang, Wei Kexiang. Dynamic characteristics of electrostatically actuated MEMS under parametric excitations. Chinese Journal of Theoretical and Applied Mechanics, 2009, 41(2): 282-288 (in Chinese))
|
2 Xu L, Sun L. Electromechanical coupled non-linear vibration of the micro plate. Journal of Mechanical Engineering Science, 2010, 224(C6): 1383-1396
|
3 孙丽波, 许立忠, 刘庆玲. 静电激励微板动力学特性研究. 振动工程学报, 2015, 24(4):525-530 (Sun Libo, Xu Lizhong, Liu Qingling. Research on dynamics of electrostatically actuated microplate. Journal of Vibration Engineering, 2015, 24(4):525-530 (in Chinese))
|
4 Xu LZ, Sun LB. Muti-field coupled dynamics for micro plate. International Journal of Applied Electromagnetics and Mechanics, 2011, 35:201-229
|
5 董天宝, 宋亚勤. 光热激励下微悬臂梁在流体中的振动研究. 力学学报, 2014, 46(5): 703-709 (Dong Tianbao, Song Yaqin. Study on the vibration of microcantilevers immersed in fluids under photothermal excitation. Chinese Journal of Theoretical and Applied Mechanics, 2014, 46(5): 703-709 (in Chinese))
|
6 吕劲楠, 唐洁影. MEMS 微悬臂梁在冲击环境下的可靠性. 功能材料与器件学报, 2008, 14(1): 103-106 (Lü Jinnan, Tang Jieying. Reliability for MEMS micro-cantilevers under shock load. Journal of Functional Materials and Devices, 2008, 14(1): 103-106 (in Chinese))
|
7 热合曼·艾比布力, 胡英杰, 王同东等. 微悬臂梁结构的谐振式 MEMS 黏度传感器. 仪表技术与传感器, 2015, 5: 8-27 (Rahman Hebibul, Hu Yingjie, Wang Tongdong, et al. Resonant MEMS viscosity sensor of micro cantilever beam structure. Instrument Technique and Sensor, 2015, 5: 8-27 (in Chinese))
|
8 董林玺, 刘国华, 钱忺. 孔的形状和排列方式对厚孔板微结构压膜空气阻尼的影响分析. 传感技术学报, 2007, 20(6): 1262-1266 (Dong Linxi, Liu Guohua, Qian Xian. The effects of hole shapes and array forms on the squeeze film air damping of thick perforated microstructures. Chinese Journal of Sensors and Actuators, 2007, 20(6): 1262-1266 (in Chinese))
|
9 Vijay C, Mark S, Louis C. Experimental study of acoustic impedance of MEMS-based micro-perforated liners//27th AIAA Aeroacoustics Conference. 2006.
|
10 邵宝东, 孙兆伟. 基于MEMS 的微槽冷却系统在微纳卫星热控中的应用. 上海航天, 2006, 4: 34-38 (Shao Baodong, Sun Zhaowei. Application of MEMS-based microchannel cooling systems in micro/ nano satellite thermal control. Aerospace Shanghai, 2006, 4: 34-38 (in Chinese))
|
11 Agache V, Blanco-Gomez G, Baleras F, et al. An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid. Lab on a Chip, 2011, 11: 2598-2603
|
12 Zhang CL, Xu GH, Jiang Q. Analysis of the air-damping effect on a micromachined beam resonator. Mathematics and Mechanics of Solids, 2003, 8(3): 315-325
|
13 Craighead HG. Nanoelectromechanical systems. Science, 2000, 290(5496): 1532-1535
|
14 Mehner JE, Doetzel W, Schauwecker B. Reduced order modeling of fluid structural interactions in MEMS based on model projection techniques//IEEE ed. Transducers 2003, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, 2003. Danvers: Institute of Electrical and Electronics Engineers, 2003. Vol. 2, pp. 1840-1843
|
15 康新, 席占稳. 基于Cosserat 理论的微梁振动特性的尺度效应. 机械强度, 2007, 29(1): 1-4 (Kang Xin, Xi Zhanwen. Size effect on the dynamic characteristic of a micro beam based on cosserat theory. Journal of Mechanical Strength, 2007, 29(1): 1-4 (in Chinese))
|
16 王晓明, 王飞, 赵学增等. 基于Cosserat 理论的四边简支自由振动微平板尺度效应研究. 固体力学学报, 2012, 33(1): 63-68 (Wang Xiaoming, Wang Fei, Zhao Xuezeng, et al. On the size effect in a freely-vibrating micro-plate with the four edges simply-supported based on the cosserat theory. Chinese Journal of Solid Mechanics, 2012, 33(1): 63-68 (in Chinese))
|
17 Bao MH, Yang H. Squeeze film air damping in MEMS. Sensors and Actuators A: Physical, 2007, 136(1): 3-27
|
18 Langlois WE. Isothermal squeeze films. Quart Appl Math, 1962, XX(2): 131–150
|
19 Griffin WS, Richarson HH, Yamanami S. A study of fluid squeezefilm damping. Journal of Basic Engineering, 1966, 88(2): 451-456
|
20 Blech J. On isothermal squeeze films. Journal of Lubrication Technology, 1983, 105(4): 615-620
|
21 Cussler EL. Diffusion: Mass Transfer in Fluid Systems. Cambridge University Press, 1997
|
22 Tison SA. Experimental data and theoretical modeling of gas flows through metal capillary leaks. Vacuum, 1993, 44: 1171-1175
|
23 Coronell DG, Jensen K F. Analysis of transition regime flows in low pressure CVD reactors using the direct simulation monte carlo method. Journal of Electrochemical Society. 1992, 139: 2264-2273
|
24 Beskok A, Karniadakis GE. Report: a model for flows in channels, pipes, and ducts at micro and nano scales. Microscale Thermophysical Engineering, 1999, 3: 43-77
|
25 Veijola T, Kuisma H, Lahdenperä J, et al. Equivalent-circuit model of the squeezed gas film in a silicon accelerometer. Sensors and Actuators A: Physical, 1995, 48(3): 239-248
|
26 Fukui S, Kaneko R. Analysis of ultra-thin gas film lubrication based on linearized Boltzmann equation: first report—derivation of a generalized lubrication equation including thermal creep flow. Journal of Tribology, 1988, 110(2): 253-261
|
27 Fukui S, Kaneko R. A database for interpolation of Poiseuille flow rates for high Knudsen number lubrication problems. Journal of Tribology, 1990, 112(1): 78-83
|
28 Carneal JP, Fuller CR. An analytical and experimental investigation of active structural acoustic control of noise transmission through double panel systems. Journal of Sound and Vibration, 2004, 272(3): 749-771
|
29 任树伟, 辛锋先, 卢天健. 考虑尺度效应的微平板声振耦合特性研究. 中国科学: 技术科学, 2014, 44: 201-208 (Ren Shuwei, Xin Fengxian, Lu Tianjian. Scale effect analysis for the vibro-acoustic performance of a simply-supported micro-plate. Sci Sin Tech, 2014, 44: 201-208 (in Chinese))
|
30 武洁. 微悬臂梁机电系统的动力学特性研究. [硕士论文]. 上海: 上海交通大学. 2012 (Wu Jie. Investigation of microcantilever electromechanical system dynamic. [Master Thesis]. Shanghai: Shanghai Jiao Tong University. 2012 (in Chinese))
|
31 Chong ACM, Yang F, Lam DCC, et al. Torsion and bending of micron-scaled structures. Journal of Materials Research, 2001, 16(4): 1052-1058
|
32 辛锋先, 卢天健. 轻质板壳结构设计的振动和声学基础. 北京: 科学出版社, 2012.
|
33 菲赫金哥尔茨. 微积分学教程, 第三卷, 第十九章. 路可见, 等译. 高等教育出版社, 2006
|