Abstract: In recent years, ultrashort laser pulses are widely used in the fields of ultra-precision machining, optical storage and microelectronic manufacture due to the advantages of high power density, short duration and high machining accuracy. In the manuscript, the memory-dependent nonlocal generalized thermoelastic diffusion theory is established based on the L-S generalized thermoelastic diffusion theory as well as considering the memory-dependent effect and spatial nonlocal effect. The theory can accurately predict the thermoelastic diffusion responses of structures whose geometry size is equivalent to its internal characteristic scale. The control equations of the theory are derived, and the solution of the control equations are obtained based on the Laplace integral transformation. As a numerical example, the transient thermoelastic diffusion responses of a semi-infinite thin plate subjected to a non-Gaussian laser pulse and a chemical shock are studied. The variation of the temperature, chemical potential, displacement, stresses and concentration with different nonlocal parameters, thermal time delay factors and diffusion time delay factors are obtained. The results show that heat conduction has significant effect on mass transfer, while mass transfer has little effect on heat conduction; nonlocal parameter has significant influence on displacement and stress, but little effect on temperature, chemical potential and concentration. The establishment of this theory and the solution method are aimed at accurately predicting the transient responses of the heat and mass under the impact of mechanical loading, heat and chemical potential.