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侯立凯, 范旭, 金羽卓, 刘铭扬, 包福兵. 液体微小流量测量技术研究进展. 力学学报, 待出版. DOI: 10.6052/0459-1879-23-500
引用本文: 侯立凯, 范旭, 金羽卓, 刘铭扬, 包福兵. 液体微小流量测量技术研究进展. 力学学报, 待出版. DOI: 10.6052/0459-1879-23-500
Hou Likai, Fan Xu, Jin Yuzhuo, Liu Mingyang, Bao Fubing. Research progress of liquid micro-flow measurement techniques. Chinese Journal of Theoretical and Applied Mechanics, in press. DOI: 10.6052/0459-1879-23-500
Citation: Hou Likai, Fan Xu, Jin Yuzhuo, Liu Mingyang, Bao Fubing. Research progress of liquid micro-flow measurement techniques. Chinese Journal of Theoretical and Applied Mechanics, in press. DOI: 10.6052/0459-1879-23-500

液体微小流量测量技术研究进展

RESEARCH PROGRESS OF LIQUID MICRO-FLOW MEASUREMENT TECHNIQUES

  • 摘要: 随着流体力学与生命科学、材料科学、医疗健康、能源环境、先进制造等多学科领域的交叉融合, 微量液体与微流控技术逐渐在这些领域取得了广泛的应用. 与此同时, 液体微小流量(每分钟几微升、几纳升, 甚至更低)的测量需求逐渐凸显出来. 随着特征尺度的减小, 原有的液体流量测量技术已经无法满足测量准确度的要求, 因此, 需要流量测量技术的进一步发展来满足微小流量测量和传感器微尺度集成的需求. 文章介绍了液体微小流量的应用背景和面临的主要问题, 首先, 根据测量过程中是否引入外界能量(例如电能、热能等), 将现有的和正在开发的液体微小流量测量技术分为有源流量测量技术和无源流量测量技术; 其次, 分别对其包含的具体测量技术展开论述, 主要包括质量流量测量技术(科里奥利、微谐振器)、热式流量测量技术(热损失型、热分布型、热脉冲型)、光流控流量测量技术(光致褪色)、压力转换流量测量技术(压差式、悬臂式、柔性膜形变)、粒子测速技术、重力测量技术、弯月面追踪技术等, 并讨论了上述测量技术的传感测量原理、测量性能指标和优缺点; 最后, 结合液体微小流量测量技术的发展和先进测量体系的建设, 总结了液体微小流量测量的应用前景和有待解决的挑战.

     

    Abstract: With the interdisciplinary research of fluid mechanics and multi-disciplinary fields such as life science, materials science, medical and health, energy technology, environmental sciences, advanced manufacturing, etc., liquid micro flow and microfluidic technology have gradually been widely applied in the above fields. At the same time, the need to measure liquid micro flow (microliters or nanoliters per minute, or even smaller) is becoming more and more prominent. With the shrink of characteristic scale under the microscale application, the original liquid flow measurement technology has been unable to meet the requirements of measurement accuracy of liquid micro flow. Therefore, the further development of flow measurement technology is needed to meet the needs of micro flow measurement and microscale integration of sensors. This paper mainly introduces the existing and developing liquid micro flow measurement technologies and discusses its application background and existing problems. Firstly, depending on whether external energy (such as electric energy, heat energy, etc.) is introduced in the measurement process, the existing and developing liquid micro flow measurement technologies are divided into active flow measurement technology and passive flow measurement technology. Then, their specific measurement technologies are discussed respectively, including mass flow measurement technology (Coriolis flow measurement, micro resonator), thermal flow measurement technology (heat loss flow measurement, calorimetric flow measurement, time of flight flow measurement), optofluidics technology (photobleaching flow measurement), pressure conversion flow measurement technology (pressure difference flow measurement, cantilever flow measurement, flexible film deformation flow measurement), particle image velocimetry technology, gravity measurement technology, meniscus tracking technology, etc.. The sensor measurement principle, measurement performance index, advantages and disadvantages of the above-mentioned liquid micro flow measurement technologies are discussed. Finally, combined with the development of liquid micro flow measurement technology and the construction of national advanced measurement system, the application prospect and challenges to be solved in micro flow measurement of liquid are summarized.

     

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