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张文明 孟光 魏克湘. 参数激励下静电驱动微机电系统动力特性研究[J]. 力学学报, 2009, 41(2): 282-288. DOI: 10.6052/0459-1879-2009-2-2007-598
引用本文: 张文明 孟光 魏克湘. 参数激励下静电驱动微机电系统动力特性研究[J]. 力学学报, 2009, 41(2): 282-288. DOI: 10.6052/0459-1879-2009-2-2007-598
Wenming Zhang, Guang Meng, Kexiang Wei. Dynamic characteristics of electrostatically actuated mems under parametric excitations[J]. Chinese Journal of Theoretical and Applied Mechanics, 2009, 41(2): 282-288. DOI: 10.6052/0459-1879-2009-2-2007-598
Citation: Wenming Zhang, Guang Meng, Kexiang Wei. Dynamic characteristics of electrostatically actuated mems under parametric excitations[J]. Chinese Journal of Theoretical and Applied Mechanics, 2009, 41(2): 282-288. DOI: 10.6052/0459-1879-2009-2-2007-598

参数激励下静电驱动微机电系统动力特性研究

Dynamic characteristics of electrostatically actuated mems under parametric excitations

  • 摘要: 充分考虑压膜阻尼效应的影响,提出参数激励下时变电容式静电驱动微机电系统的动力学模型,采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性,探讨不同控制电压和频率比对系统幅频响应的影响,分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性,结果表明,微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为,压膜阻尼效应对系统动力特性的影响不可忽视.

     

    Abstract: A dynamic model for thetime-variable-electric-capacity-type electrostatically actuatedmicro-electro-mechanical systems (MEMS) under parametric excitations ispresented with the effect of squeeze film damping. The harmonic balance (HB)method is applied to simulate the frequency response of this system underthe combined parametric and forcing excitations. The effects of the appliedvoltages and frequency ratios on the frequency responses of the system arediscussed. In addition, the nonlinear dynamic characteristics of this systemare studied with the control parameters of the amplitude of the alteringcurrent voltage, frequency ratio and squeeze film damping ratio. Thetheoretical results indicated the nonlinear dynamic characteristics,bifurcation and chaos of the electrostatically actuated MEMS underparametric excitations. Furthermore, it was also indicated that the effectof squeeze film damping on the dynamic characteristics of the system cannotbe ignored. This investigation provides an understanding of the nonlineardynamic characteristics of electrostatically actuated MEMS under parametricexcitations at micro-scale.

     

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