EI、Scopus 收录
中文核心期刊

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

利用维氏和玻氏压头表征半导体材料断裂韧性

刘明 侯冬杨 高诚辉

刘明, 侯冬杨, 高诚辉. 利用维氏和玻氏压头表征半导体材料断裂韧性[J]. 力学学报, 2021, 53(2): 413-423. doi: 10.6052/0459-1879-20-349
引用本文: 刘明, 侯冬杨, 高诚辉. 利用维氏和玻氏压头表征半导体材料断裂韧性[J]. 力学学报, 2021, 53(2): 413-423. doi: 10.6052/0459-1879-20-349
Liu Ming, Hou Dongyang, Gao Chenghui. STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS[J]. Chinese Journal of Theoretical and Applied Mechanics, 2021, 53(2): 413-423. doi: 10.6052/0459-1879-20-349
Citation: Liu Ming, Hou Dongyang, Gao Chenghui. STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS[J]. Chinese Journal of Theoretical and Applied Mechanics, 2021, 53(2): 413-423. doi: 10.6052/0459-1879-20-349

利用维氏和玻氏压头表征半导体材料断裂韧性

doi: 10.6052/0459-1879-20-349
基金项目: 1) 国家自然科学基金(51705082);国家自然科学基金(51875106);晋江市福大科教园区发展中心科研项目资助(2019-JJFDKY-11)
详细信息
    作者简介:

    2) 刘明, 教授, 主要研究方向: 表面微观力学与压痕测试方法. E-mail: mingliu@fzu.edu.cn

    通讯作者:

    刘明

  • 中图分类号: TG115.57

STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS

  • 摘要: 压痕法是测量材料断裂韧性 ($K_{\rm IC})$ 的常用方法之一, 如何根据不同的材料、不同的压头选择适合的公式, 是当前面临的一大问题. 因此,在不同载荷下对单晶硅 (111) 和碳化硅 (4H-SiC, 0001面) 这两种半导体材料进行了维氏微米硬度和玻氏纳米压痕实验, 对实验产生的裂纹长度$c$进行了统计分析, 并采用13个压痕公式计算材料的$K_{\rm IC}$, 开展了微米划痕实验, 验证压痕法评估半导体材料$K_{\rm IC}$的适用性. 研究结果表明: 为了消除维氏压痕实验产生的$c$的固有离散性, 需要多次测量取平均值; 裂纹长度与压痕尺寸的比值随压痕载荷的增大而增大; 材料的裂纹类型与载荷相关且低载荷下表现为巴氏裂纹, 高载荷下表现为中位裂纹; 与微米划痕实验得到的单晶硅和碳化硅材料的$K_{\rm IC}$平均值 (分别为0.96 MPa,$\cdot$,$\sqrt{\rm m}$和2.89 MPa,$\cdot$,$\sqrt{\rm m}$) 相比, 在同一压头下无法从13个公式中获得同时适用于单晶硅和碳化硅材料的压痕公式,但在同一材料下可以获得同时适用于维氏和玻氏压头的$K_{\rm IC}$计算公式; 基于中位裂纹系统发展而来的压痕公式更适合用于评估半导体材料的$K_{\rm IC}$, 且维氏压头下的$K_{\rm IC}$与玻氏压头下$K_{\rm IC}$的关系不是理论上的1.073倍, 应为1.13$\pm $0.01.}

     

  • [1] 崔金平. 基于亚微米尺度超尖V切口的SEVNB法对陶瓷断裂韧性可靠评价的研究. [硕士论文]. 广州: 华南理工大学, 2018

    (Cui Jinping. Reliable evaluation of fracture toughness of ceramics tested by SEVNB method based on sub-micrometer v-notch. [Master Thesis]. Guangzhou: South China University of Technology, 2018 (in Chinese))
    [2] Zhu XK, Joyce JA. Review of fracture toughness (G, K, J, CTOD, CTOA) testing and standardization. Engineering Fracture Mechanics, 2012,85:1-46
    [3] 熊迅, 李天密, 马棋棋 等. 石英玻璃圆环高速膨胀碎裂过程的离散元模拟. 力学学报, 2018,50(3):622-632

    (Xiong Xun, Li Tianmi, Ma Qiqi, et al. Discrete element simulations of the high velocity expansion and fragmentation of quartz glass rings. Journal of Theoretical and Applied Mechanics. 2018,50(3):622-623 (in Chinese))
    [4] Morrell R. Fracture toughness testing for advanced technical ceramics: internationally agreed good practice. Advances in Applied Ceramics, 2006,105(2):88-98
    [5] Fujii T, Nose T. Evaluatlon of fracture toughness for ceramic materials. ISIJ International, 1989,29(9):717-725
    [6] Gao CH, Liu M. Effects of normal load on the coefficient of friction by microscratch test of copper with a spherical indenter. Tribology Letters, 2019,67(8):1-12
    [7] Zhang D, Sun Y, Gao CH, et al. Measurement of fracture toughness of copper via constant-load microscratch with a spherical indenter. Wear, 2020, 444-445:203158
    [8] Liu M, Wu JN, Gao CH. Sliding of a diamond sphere on K9 glass under progressive load. Journal of Non-Crystalline Solids, 2019,526:119711
    [9] Guo YN, Staedler T, Müller J. et al. A detailed analysis of the determination of fracture toughness by nanoindentation induced radial cracks. Journal of the European Ceramic Society, 2020,40(2):276-289
    [10] Gupta I, Sondergeld C, Rai C. Fracture toughness in shales using nano-indentation. Journal of Petroleum Science and Engineering, 2020,191:107222
    [11] Lawn BR, Evans AG, Marshall BD. Elastic/Plastic indentation damage in ceramics: the mediad/radial crack system. Journal of the American Ceramic Society, 1980,63(9-10):574-581
    [12] Anstis GR, Chantikul P, Lawn BR. et al. A critical evaluation of indentation techniques for measuring fracture toughness: I, direct crack measurements. Journal of the American Ceramic Society, 1981,64(9):533-538
    [13] 刘明, 李烁, 高诚辉. 利用圆锥压头微米划痕测试材料断裂韧性. 摩擦学学报, 2019,39(5):556-564

    (Liu Ming, Li Shuo, Gao Chenghui. Fracture toughness measurement by micro-scratch tests with conical indenter. Tribology. 2019,39(5):556-564 (in Chinese))
    [14] 尹邦跃, 王零森. ZrO$_{2}$基陶瓷压痕断裂韧性的测定. 粉末冶金材料科学与工程, 2001,6(1):78-82

    (Yin Bangyue, Wang Lingsen. Evaluation of fracture toughness of zirconia-based ceramic by the indentation method. Materials Science and Engineering of Powder Metallu. 2001,6(1):78-82 (in Chinese))
    [15] Li WL, Liu WW, Qi F. et al. Determination of micro-mechanical properties of additive manufactured alumina ceramics by nanoindentation and scratching. Ceramics International, 2019,45(8):10612-10618
    [16] 张来启, 黄永安, 黄蕾 等. 压痕法测定Mo$_{5}$SiB$_{2}$合金断裂韧性的经验方程确定. 材料热处理学报, 2017,38(1):178-183

    (Zhang Laiqi, Huang Yongan, Huang Lei, et al. Determination of empirical equation of fracture toughness for Mo$_{5}$SiB$_{2}$ alloy by indentation method. Transactions of Materials and Heat Treatment. 2017,38(1):178-183 (in Chinese))
    [17] Ke Z, Zheng Y, Zhang GT. et al. Microstructure and mechanical properties of dual-grain structured WC-Co cemented carbides. Ceramics International, 2019,45(17):21528-21533
    [18] 姜晨, 高睿, 姜臻禹 等. 光学玻璃超声振动维氏压痕中位裂纹的实验研究. 光子学报, 2019,48(7):7-14

    (Jiang Chen, Gao Rui, Jiang Zhenyu, et al. Experimental investigation of median crack in indentation of optical glass under ultrasonic vibration. Acta Photonica Sinica. 2019,48(7):7-14 (in Chinese))
    [19] 沈剑云, 朱旭, 宋伟 等. 旋转超声锯切光学玻璃的表面形成机理研究. 表面技术, 2019,48(2):281-289

    (Shen Jianyun, Zhu Xu, Song Wei, et al. Surface formation mechanism of optical glass by rotary ultrasonic sawing. Surface Technology. 2019,48(2):281-289 (in Chinese))
    [20] Niihara K. A fracture mechanics analysis of indentation-induced Palmqvist crack in ceramics. Journal of Materials Science Letters, 1983,2:221-223
    [21] Laugier MT. New formula for indentation toughness in ceramics. Journal of Materials Science Letters, 1987,6:355-356
    [22] Shetty DK, Wright IG, Mincer PN. et al. Indentation fracture of WC-Co cermets. Journal of Materials Science, 1985,20:1873-1882
    [23] Lawn BR, Swain MV. Microfracture beneath point indentations in brittle solids. Journal of Materials Science Letters, 1975,10:113-122
    [24] Tanaka K. Elastic/plastic indentation hardness and indentation fracture toughness: The inclusion core model. Journal of Materials Science, 1987,22:1501-1508
    [25] Lawn BR, Fuller ER. Equilibrium penny-like cracks in indentation fracture. Journal of Materials Science, 1975,10:2016-2024
    [26] Evans AG, Charles EA. Fracture toughness determinations by indentation. Journal of The American Ceramic Society, 1976,59(7-8):371-372
    [27] Niihara K, Morena R, Hasselman DPH. Evaluation of $K_{ m IC}$ of brittle solids by the indentation method with low crack-to-indent ratios. Journal of Materials Science Letters, 1982,1:13-16
    [28] Evans AG. Fracture mechanics applied to brittle materials. Philadelphia, PA: ASTM, 1979: 112-135
    [29] Lankford J. Indentation microfracture in the Palmqvist crack regime: implications for fracture toughness evaluation by the indentation method. Journal of Materials Science Letters, 1982,1:493-495
    [30] Blendell EJ. The origins of internal stresses in polycrystalline Al$_{2}$O$_{3}$ and their effects on mechanical properties. Massachusetts: Massachusetts Institute of Technology, 1979: 120-126
    [31] Quinn GD, Bradt RC. On the Vickers indentation fracture toughness test. Journal of the American Ceramic Society, 2007,90(3):673-680
    [32] Morrel R. Fracture toughness testing for advanced technical ceramics: internationally agreed good practic. Advances in Applied Ceramics, 2006,105(2):88-98
    [33] Marshall DB, Cook RF, Padture NP. et al. The compelling case for indentation as a functional exploratory and characterization tool. Journal of the American Ceramic Society, 2015,98(9):2671-2680
    [34] Liu M, Zheng Q, Gao CH. Sliding of a diamond sphere on fused silica under ramping load. Materials Today Communications, 2020,25:101684
    [35] 徐甲然. 多孔硅/单晶硅太阳电池制备及性能分析. [硕士论文]. 北京: 华北电力大学, 2019

    (Xu Jiaran. Preparation and characterization of porous silicon/monocrystalline silicon solar cells. [Master Thesis]. Beijing: North China Electric Power University, 2019 (in Chinese))
    [36] Jahdi S, Hedayati M, Stark BH. et al. The impact of temperature and switching rate on dynamic transients of high-voltage silicon and 4H-SiC NPN BJTs: A technology evaluation. IEEE Transactions on Industrial Electronic, 2020,67(6):4556-4566
    [37] 曹明月, 张启, 吴建国 等. 缝合式 C/SiC 复合材料非线性本构关系及断裂行为研究. 力学学报, 2020,52(4):1095-1105

    (Cao Mingyue, Zhang Qi, Wu Jianguo, et al. Study on nonlinear constitutive relationship and fracture behavior of stitched C/SiC composites. Chinese Journal of Theoretical and Applied Mechanics. 2020,52(4):1095-1105 (in Chinese))
    [38] 卢广达, 陈建兵. 基于一类非局部宏-微观损伤模型的裂纹模拟. 力学学报, 2020,52(3):749-762

    (Lu Guangda, Chen Jianbing. Cracking simulation based on a nonlocal macro-meso-scale damage model. A Chinese Journal of Theoretical and Applied Mechanics. 2020,52(3):749-762 (in Chinese))
    [39] 王勃, 张阳博, 左宏 等. 压应力对压剪裂纹扩展的影响研究. 力学学报, 2019,51(3):845-851

    (Wang Bo, Zhang Yangbo, Zuo Hong, et al. Study on the influence of compressive stress on the compression shear crack propagation. Chinese Journal of Theoretical and Applied Mechanics. 2019,51(3):845-851 (in Chinese))
    [40] 李德刚, 梁迎春, 白清顺. 单晶硅各向异性力学性能纳米压痕实验研究. 航空精密制造技术, 2008,44(2):9-12

    (Li Degang, Liang Yingchun, Bai Qingshun. Nano-indentation experiments on anisotropic mechanical properties of single crystal silicon. Aviation Precision Manufacturing Technology. 2008,44(2):9-12 (in Chinese))
    [41] Field JS, Swain MV, Dukino RD. Determination of fracture toughness from the extra penetration produced by indentation-induced pop-in. Journal of Materials Research Society, 2003,18(6):1412-1419
    [42] Li Z, Ghosh A, Kobayash AS. et al. Indentation fracture toughness of sintered silicon carbide in the Palmqvist crack regime. Journal of the American Ceramic Society, 1989,72(6) : 904-911
    [43] Gao CH, Liu M. Instrumented indentation of fused silica by Berkovich indenter. Journal of Non-Crystalline Solids, 2017,475:151-160
    [44] Gong JH, Chen YF, Li CY. Statistical analysis of fracture toughness of soda-lime glass determined by indentation. Journal of Non-Crystalline Solids, 2001,279:219-223
    [45] Kazembeyki M, Bauchy M, Hoover GC. New insights into the indentation size effect in silicate glasses. Journal of Non-Crystalline Solids, 2019,521:119494
    [46] Dukino RD, Swain MV. Comparative Measurement of indentation fracture toughness with Berkovich and Vickers indenters. Journal of the American Ceramic Society, 1992,75(12):3299-3304
    [47] 丘泰. 用压痕法测定几种高温结构陶瓷$K_{ m IC}$值的研究. 硅酸盐通报, 1991,10(2):44-50

    (Qiu Tai. Study on the determination of $K_{ m IC}$ value of several high temperature structural ceramics by indentation method. Bulletin of the Chinese Ceramic Society. 1991,10(2):44-50 (in Chinese))
    [48] Lin JD, Duh JG. Fracture toughness and hardness of ceria- and yttria-doped tetragonal zirconia ceramics. Journal of Materials Chemistry and Physics, 2002,78:253-261
    [49] Akono AT, Randall NX, Ulm FJ. Experimental determination of the fracture toughness via microscratch tests: application to polymers, ceramics, and metals. Journal of Materials Research, 2012,27(2):485-493
    [50] Liu M, Yang SH, Gao CH. Scratch behavior of polycarbonate by Rockwell C diamond indenter under progressive loading. Polymer Testing, 2020,90:106643
    [51] Yasutake K, Iwata M, Yoshii K. et al. Crack healing and fracture strength of silicon crystals. Journal of Materials Science, 1986,21:2185-2192
    [52] Ouchterlony F. Stress intensity factors for the expansion loaded star crack. Engineering Fracture Mechanics, 1976,8:447-448
    [53] 韩强, 屈展, 叶正寅 等. 基于微米力学实验的页岩I型断裂韧度表征. 力学学报, 2019,51(4):1245-1254

    (Han Qiang, Qu Zhan, Ye Zhengyin, et al. Study on fracture toughness of mode I of shale based on micro-mechanical test. Chinese Journal of Theoretical and Applied Mechanics. 2019,51(4):1245-1254 (in Chinese))
    [54] GB/T 37900—2019, 超薄玻璃硬度和断裂韧性试验方法小负荷维氏硬度压痕法

    ( GB/T 37900—2019, Test method of hardness and fracture toughness for ultra-thin glass—Low-load vickers hardness indentation method (in Chinese))
  • 加载中
计量
  • 文章访问数:  2217
  • HTML全文浏览量:  163
  • PDF下载量:  606
  • 被引次数: 0
出版历程
  • 收稿日期:  2020-10-07
  • 刊出日期:  2021-02-10

目录

    /

    返回文章
    返回