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轻敲模式下 AFM 动力学模型及能量耗散机理研究

魏征 郑骁挺 刘晶 魏瑞华

魏征, 郑骁挺, 刘晶, 魏瑞华. 轻敲模式下 AFM 动力学模型及能量耗散机理研究[J]. 力学学报, 2020, 52(4): 1106-1119. doi: 10.6052/0459-1879-20-099
引用本文: 魏征, 郑骁挺, 刘晶, 魏瑞华. 轻敲模式下 AFM 动力学模型及能量耗散机理研究[J]. 力学学报, 2020, 52(4): 1106-1119. doi: 10.6052/0459-1879-20-099
Wei Zheng, Zheng Xiaoting, Liu Jing, Wei Ruihua. STUDY ON A DYNAMICS MODEL OF TAPPING MODE AFM AND ENERGY DISSIPATION MECHANISM[J]. Chinese Journal of Theoretical and Applied Mechanics, 2020, 52(4): 1106-1119. doi: 10.6052/0459-1879-20-099
Citation: Wei Zheng, Zheng Xiaoting, Liu Jing, Wei Ruihua. STUDY ON A DYNAMICS MODEL OF TAPPING MODE AFM AND ENERGY DISSIPATION MECHANISM[J]. Chinese Journal of Theoretical and Applied Mechanics, 2020, 52(4): 1106-1119. doi: 10.6052/0459-1879-20-099

轻敲模式下 AFM 动力学模型及能量耗散机理研究

doi: 10.6052/0459-1879-20-099
基金项目: 1)国家自然科学基金(11572031)
详细信息
    通讯作者:

    魏征

  • 中图分类号: O326,TH742.9

STUDY ON A DYNAMICS MODEL OF TAPPING MODE AFM AND ENERGY DISSIPATION MECHANISM

  • 摘要: 轻敲模式下探针从远离到间歇性接触样品表面,是一个连续的能量耗散过程.针对该连续过程的能量耗散机理研究仅零星存在于各个文献之中,对于连续过程中各个阶段的能量耗散机理也没有一个系统的解释和实验验证.本文提出了新的位移激励下原子力显微镜探针-样品系统简化模型并得到了一维振子系统等效阻尼的计算方法,并通过该方法计算了探针在远离样品表面时的空气黏性阻尼和靠近样品时的空气压膜阻尼,分析了探针从远离样品到间歇性接触样品表面这一过程中的环境耗散机理变化,得到了原子力显微镜系统理论品质因数与探针工作位置的关系曲线;在此基础上设计了轻敲模式下的微悬臂梁扫频实验,得到了系统实验品质因数与探针工作位置的关系曲线,进而验证了理论模型的准确性. 本文通过对轻敲模式下AFM环境耗散机理进行理论分析和实验验证,希望可以对轻敲模式下AFM动力学特性及其阻尼作用机理有更近一步的认识,同时对微纳米机电系统 (MEMS/NEMS) 能量耗散机理的研究提供理论参考和实验方法.

     

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出版历程
  • 收稿日期:  2020-04-02
  • 刊出日期:  2020-08-10

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