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 引用本文: 张文明, 孟光. 静电微电机微转子接触动力学特性分析[J]. 力学学报, 2005, 37(6): 756-763.
Contact Dynamics of the Rotor and Bearing Hub in Electrostatic Micromotor[J]. Chinese Journal of Theoretical and Applied Mechanics, 2005, 37(6): 756-763.
 Citation: Contact Dynamics of the Rotor and Bearing Hub in Electrostatic Micromotor[J]. Chinese Journal of Theoretical and Applied Mechanics, 2005, 37(6): 756-763.

## Contact Dynamics of the Rotor and Bearing Hub in Electrostatic Micromotor

• 摘要: 提出静电微电机中转子和固定轴承间相互接触的数学模型，对微尺度下的接触应力和应变特性进行理论推导，分析静电微电机几何参数、静电力、材料特性及加载电压对接触宽度、应力和应变特性的影响，对比研究不同工况下接触宽度、接触应力和应变的变化，并就相同的问题进行有限元分析，探讨摩擦系数对接触区von Mises应力、应变和接触压力的影响，结果表明有限元模拟所得接触应力和应变分布与数学模型的解析值较为相似.

Abstract: A mathematical model of the contact between the rotor and bearing hub of electrostatic micromotor, which actuated MEMS, is constructed to investigate the contact dynamics. It is illustrated that in what way the contact problem of the contact stress and strain equations can be presented under the scaling effects of micro-scale. The parameters, the geometries of the micromotor, the electrostatic force, the material characteristics, and the applied gap voltages, which are related to the contact, are discussed in detail. The discriminations between unchanged gap and maximum changed gap under different applied voltages and various materials are studied. Some results of the contact width, the contact stress, the contact strain, are compared with finite element model (FEM) solutions of an equivalent problem. The 1st principal stress and strain and whole contact stress for expressing the distributions are shown. The small differences between the both methods, showing characteristic features of FEM and the theoretical assumptions, are explained.

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