基于LBM的铝微滴斜柱沉积水平偏移研究1)
A LATTICE-BOLTZMANN METHOD SIMULATION OF THE HORIZONTAL OFFSET IN OBLIQUE COLUMN DEPOSITION OF ALUMINUM DROPLETS1)
基于LBM的铝微滴斜柱沉积水平偏移研究1) |
| 任彦霖, 刘赵淼, 逄燕, 王翔 |
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A LATTICE-BOLTZMANN METHOD SIMULATION OF THE HORIZONTAL OFFSET IN OBLIQUE COLUMN DEPOSITION OF ALUMINUM DROPLETS1) |
| Ren Yanlin, Liu Zhaomiao, Pang Yan, Wang Xiang |
| 图9 斜柱倾角与扫描步距关系及其沉积形貌 |
| Fig.9 Relationship between the tilt angle and the scanning step |
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