利用维氏和玻氏压头表征半导体材料断裂韧性1) |
刘明, 侯冬杨, 高诚辉 |
STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1) |
Liu Ming, Hou Dongyang, Gao Chenghui |
图5 基于LEFM模型的断裂韧性分析 |
Fig.5 Fracture toughness analysis based on LEFM model |