利用维氏和玻氏压头表征半导体材料断裂韧性1)
刘明, 侯冬杨, 高诚辉

STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1)
Liu Ming, Hou Dongyang, Gao Chenghui
图5 基于LEFM模型的断裂韧性分析
Fig.5 Fracture toughness analysis based on LEFM model