利用维氏和玻氏压头表征半导体材料断裂韧性1)
刘明, 侯冬杨, 高诚辉

STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1)
Liu Ming, Hou Dongyang, Gao Chenghui
图3 样品的维氏和纳米硬度随载荷的变化图
Fig.3 Variation of hardness with the load under Vickers and Berkovich indenter