利用维氏和玻氏压头表征半导体材料断裂韧性1) |
刘明, 侯冬杨, 高诚辉 |
STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1) |
Liu Ming, Hou Dongyang, Gao Chenghui |
图3 样品的维氏和纳米硬度随载荷的变化图 |
Fig.3 Variation of hardness with the load under Vickers and Berkovich indenter |