利用维氏和玻氏压头表征半导体材料断裂韧性1) |
刘明, 侯冬杨, 高诚辉 |
STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1) |
Liu Ming, Hou Dongyang, Gao Chenghui |
图7 玻氏压头下计算材料$K_{\rm IC}$的示意图 |
Fig.7 Schematic diagram of calculating fracture toughness of materials under Berkovich indenter |