利用维氏和玻氏压头表征半导体材料断裂韧性1)
刘明, 侯冬杨, 高诚辉

STUDY ON FRACTURE TOUGHNESS OF SEMICONDUCTOR MATERIAL USING VICKERS AND BERKOVICH INDENTERS1)
Liu Ming, Hou Dongyang, Gao Chenghui
表2 样品参数和维氏压痕尺寸
Table 2 Parameters of samples and Vickers indentation