Chinese Journal of Theoretical and Applied Mechani ›› 2009, Vol. 41 ›› Issue (2): 282-288.DOI: 10.6052/0459-1879-2009-2-2007-598

• Brief Report • Previous Articles    

Dynamic characteristics of electrostatically actuated mems under parametric excitations

Wenming Zhang Guang Meng Kexiang Wei   

  1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, China State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, China State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, China
  • Received:2007-12-03 Revised:2008-05-28 Online:2009-03-25 Published:2009-03-25

Abstract: A dynamic model for the time-variable-electric-capacity-type electrostatically actuated micro-electro-mechanical systems (MEMS) under parametric excitations is presented with the effect of squeeze film damping. The harmonic balance (HB) method is applied to simulate the frequency response of this system under the combined parametric and forcing excitations. The effects of the applied voltages and frequency ratios on the frequency responses of the system are discussed. In addition, the nonlinear dynamic characteristics of this system are studied with the control parameters of the amplitude of the altering current voltage, frequency ratio and squeeze film damping ratio. The theoretical results indicated the nonlinear dynamic characteristics, bifurcation and chaos of the electrostatically actuated MEMS under parametric excitations. Furthermore, it was also indicated that the effect of squeeze film damping on the dynamic characteristics of the system cannot be ignored. This investigation provides an understanding of the nonlinear dynamic characteristics of electrostatically actuated MEMS under parametric excitations at micro-scale.

Key words: MEMS, electrostatic actuation, parametric excitation, squeeze film damping